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Nanopositioners, Piezo Stage Positioners,
Flexure Positioners, Piezo Scanners
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Piezo stages provide advantages when it comes to very smooth motion with nanometer and subnanometer resolution. Piezoelectric positioning stages are also superior to other motor technologies in terms of step & settle performance, and fast scanning. Millisecond and even microsecond range response is feasible with a well-designed piezo flexure stage. Piezo motion stages work well in vacuum and can be manufactured with non-magnetic materials due to the non-magnetic nature of the ceramic motor material. PI is a world leader in piezo stage design with 5 decades of experience. PI's piezoelectric transducers have been life-tested for 100 Billion cycles by JPL/NASA for the Mars Mission.
In addition to classical piezo flexure stages, PI also offers piezo motors and piezo motor positioners with long travel ranges in 10mm and more than 100mm. A variety of different piezo motor principles are used, depending on the main focus, such as speed, force, resolution and cost. Select an example below and click on the image for further details. PI's piezoceramic design and manufacturing division PI Ceramic specializes in piezoelectric transducers and ultrasound transducers.
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High-Dynamics Precision Positioners / Motion Control - Introduction
Piezo Stage PDF Catalog
Flexure NanoPositioners Overview
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PI designs and manufactures the fastest and highest precision nano positiong stages in the world. PI Piezo Positioners provide higher dynamics, faster response and higher resolution, accuracy, straightness and flatnes compared to classical motor-stage positioning systems.
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High Dynamics NanoPositioners
PI offers the largest variety of custom and standard ultra-low inertia NanoPositioning Solutions.
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Ultra-Low-Inertia
NanoPositioning Systems, Ultra-High Precision Position Sensors
Ultra-low-inertia solid-state
piezo positioners can repeatedly move bidirectional nanometer
level steps, at up to hundreds of Hz if required.
Two plate capacitive
position sensors ensure highest linearity and longterm stability.
These absolute-measuring,
non-contact sensors detect motion at sub-nanometer levels directly
(direct output metrology) and provide accuracy, linearity, resolution,
stability and bandwidth superior to strain gauge type sensors (piezo resistive
sensors), LVDT sensors and incremental encoders (glass scale type encoders).
If used in parallel-kinematics multi-axis systems, they can also provide
the information for automatic runout-compensation.
Minimized recoil forces are
a by-product of the ultra-low-inertia approach.
Classical Micropositioning stages, even when equipped with high-resolution
encoders cannot achieve this precision. Their high inertia, friction,
and servo dither prevent fast motion at the nanometer level.
Click here for more information
on PI
Capacitive Position Sensors |
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| Trajectory
Control |
Active Trajectory
Control.
Active Trajectory Control is
available on single-module parallel-metrology nanopositioning systems.
It can improve straightness and flatness to sub-nanometer precision. Digital
controllers with advanced coordinate transformation algorithms allow active
trajectory control for up to 6 DoF.
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DDL |
Dynamic Digital Linearization
Preshaping™
algorithms and dynamic digital linearization can increase
the dynamic linearity and effective bandwidth of high-speed nanopositioning systems by up to 3 orders of magnitude. This translates into higher dynamic accuracy, and increased throughput.
Applications range from
out-of-round machining (pistons, contact lenses, optics) to scanning microscopy.
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Flexure Technology |
Flexures, if designed properly,
are very stiff & robust, light weight, maintenance free, and provide
nanometer to sub-nanometer-level guiding precision (simple designs induce
cosine runout errors).
They are vacuum compatible and frictionless and require neither lubricants
nor air films.
Not all flexures are created equal!
PI multi-axis NanoPositioning systems are based on FEA calculated wire-EDM-cut
parallel-kinematics flexure designs
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Serial vs. Parallel Kinematics |
A)
Stacking two single-axis stages (serial kinematics) |
Simple design but:
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Slower response (lower stage
carries inertial mass of upper stage);
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Non-symmetric dynamic behavior
(lower stage is slower than upper stage, requires different servo settings).
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Orthogonality error is mounting-angle
dependant.
Active Trajectory control not possible
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B)
Single-module (monolithic) but nested (serial) X and Y.
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Thinner and better response than A) but no other advantages |
C)
Single-module parallel-kinematics X and Y (with crosstalk compensation).
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Best solution.
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Same ultra-low
inertia for X and Y motion, providing higher responsiveness and axis-independent
performance.
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Excellent, mounting independent
orthogonality.
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Parallel-Metrology "sees" controlled degrees of freedom. Active Trajectory Control automatically compensates for runout.
Additional rotation axis
(Theta z ) feasible with 3 actuators / sensors and digital controller.
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Piezo Nano Positioning Stage Overview
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| *Models |
Axes |
*Travel [µm] |
*Feedback |
Notes |
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Objective Nano-Focus Positioners |
| Long Travel Piezo Positioner for Microscope Objectives |
Z |
100, 250, 400 |
capacitive |
NEW: Extra long range, very compact & light weight |
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| Piezo Positioner for Microscope Objectives |
Z |
100 |
capacitive |
NEW: Microscope objective positioner.
Now with QuickLock |
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| Compact Piezo Positioner for Microscope Objectives |
Z |
100 |
capacitive, LVDT |
Microscope objective positioner |
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P-722, P-723
Piezo Microscope Objective Z-Stepper |
Z |
200, 350 |
LVDT |
Microscope objective positioner |
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Open Loop Linear Piezo Positioners (1-Axis Stages) |
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P-280 Piezo Stage Positioner |
X |
30, 50, 100 |
no |
Low cost, XY and XYZ combinations |
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P-290 Piezo Z-Vertical Positioner |
Z |
1000 |
no |
Large travel range |
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P-287 Z & Tilt Piezo Positioner |
Z, θx |
700, 12 mrad |
no |
Large travel range |
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Closed Loop, Linear Piezo Positioners, (1-Axis Stages with Direct Metrology Sensors)
Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with
lower-precision piezo resistive strain gauge sensors).
The direct measuring principle provides better linearity scans with superior responsiveness, resolution, repeatability and stability to the sub-nanometer range.
Nanopositioning basics: more than just nanometers
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P-783 Piezo Vertical Piezo Positioner |
Z |
300 |
LVDT |
Large travel range, closed-loop, compact |
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P-772 Miniature Piezo Positioner Nanopositioning Stage |
X |
10 |
capacitive |
Ultra-compact, fast and accurate, smallest closed-loop stage with capacitive position feedback |
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P-780 Miniature Piezo Positioner Stage |
X |
80 |
LVDT |
Compact, fast, for small loads |
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P-750 Piezo Positioner Stage |
X |
75 |
capacitive, LVDT |
Extremely straight motion, very stiff |
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P-752 Piezo Positioner Stage |
X |
15, 30 |
capacitive |
Extremely fast and accurate, for FBG writing and disk drive
test set ups |
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P-753 Piezo Stage and Linear Actuator Combination |
Z & X |
12, 25, 38 |
capacitive |
Very small and accurate, works as both stage and linear actuator |
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P-620 Family of Piezo Positoners /Scanning Stages |
X (XY, Z) |
50 to 1800 |
capacitive |
Low Cost, Precise, Compact, Long Travel.
Also in XY, Z and XYZ |
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Multi Axis, Serial Kinematics Stages |
| *Models |
Axes |
*Travel [µm] |
*Feedback |
Notes |
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P-281
P-282 XY, XYZ Piezo Stages |
XY, XYZ |
30, 50, 100 |
no |
Low cost, compact |
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| P-611 NanoCube XYZ Piezo Stage Positioner |
XYZ |
100 |
SGS |
Smallest XYZ closed-loop stage |
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| P-620 - P-625 X, XY, Z, XYZ PIHera Multi-Axis Piezo Stage |
X, XY, Z, XYZ |
50,100,250, 500 |
capacitive |
NEW: Very Compact, Long Travel, Low Cost, Very Precise. Direct Metrology |
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Multi-Axis, Parallel Metrology, Parallel Kinematics Stages
Parallel metrology can "see" all controlled degrees of freedom simultaneously.
These stages provide superior trajectory control to serial kinematics stages.
Nanopositioning stage basics tutorial
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| P-615 NanoCube™ 350C XYZ Piezo NanoAligner |
XYZ |
to 350 |
capacitive |
NEW: Aperture. Ideal also for photonic alignment. |
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| P-363 PicoCube™ XYZ, XY Piezo Scanner for AFM, SPM |
XY, XYZ |
6 |
capacitive |
NEW: Extremely high resolution, compact, ideal for Nanotech and Biotech. |
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| P-733 XY Piezo Nano- Scanning Stage |
XY |
100x100 |
capacitive |
NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture |
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| P-733.DD Direct Drive XY, XYZ Piezo Positioning Scanning Stage |
XY, XYZ |
30x30 (x10) |
capacitive |
NEW: 20 mm flat. Extremely fast, 2 kHz Fres, Direct Drive, UH-Vacuum available. |
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| P-734 XY Piezo Stage |
XY |
100 |
capacitive |
Fast and accurate XY positioner, clear aperture, extremely straight and flat motion |
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| P-770 XY Piezo Stage |
XY |
200 |
LVDT |
200 X 200 mm clear aperture |
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| P-517, P-527 Series XY, XYZ, XYθz Piezo Nano-Scanning Stages |
XY, XYZ, XYθz |
Up to 200 in XYZ, 2 mrad |
capacitive |
Clear aperture, active trajectory control, special version with 6 degrees of freedom |
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| P-561 Series XY, XYZ, High-Speed, Direct Drive Microscopy Piezo Stages |
XY, XYZ |
45 XY, 11 Z |
capacitive |
NEW: Direct Drive, Ultra-Fast, Clear aperture, active trajectory control |
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| P-562 MARS Series XY, XYZ, Piezo Nano-Scanning Stages |
XY, XYZ |
200x200x200 |
capacitive |
NEW: Long Range, High Speed, Clear aperture, active trajectory control |
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| P-518, P-528 Series Z, Zθxθy |
Z, Zθxθy |
Up to 200 in Z, 2 mrad tip/tilt |
capacitive |
Clear aperture, active trajectory control, special version with 6 degrees of freedom |
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"Piezo Hexapod" 6DOF Parallel-Kinematic Stages |
| P-587 6D-Piezo Stage |
XYZ, θxθyθz |
800 / 10 mrad |
capacitive |
Sophisticated 6-axis closed-loop stage |
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*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision. For piezo steering mirrors, tip/tilt positioners see the "Piezo Active Optics" section.
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Piezo Actuators (Nano-Transducers) Overview
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Piezo Actuators (PZT) are ultra-high-resolution Nano-Transducers for a variety of applications from Nanotechnology to Aerospace and Biotech. PI offers the largest selection of research and industrial-reliability Piezo Actuators and Translators (linear actuators) worldwide. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to customers' requirements. PI is highly vertically integrated, controlling each manufacturing step from piezo raw materials to finished systems.
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| *Models |
Push/Pull
Force Capacity [N] |
Standard Travel Ranges [µm] |
*Closed-Loop Versions/Sensor |
Notes |
PICMA
P-885
Piezo Actuators |
1000/5 |
9, 15 |
no |
NEW: Ceramic insulated stacks worldwide first |
PT120
PT130
Piezoelectric Actuator |
0.1/0.1 |
4, 6, 8 |
no |
Tube actuator |
PL122
PL140
Piezoelectric Actuator |
1/1 |
+-250, 450, 1000 |
no |
Bender actuator, small dimensions |
P-288
Piezoelectric Actuator |
10/5 |
50 |
no |
Disk translator (flat, large travel range) |
P-286
P-289
Piezoelectric Actuator |
20/10 |
100, 200 |
no |
Disk translator (flat, large travel range) |
P-810
Piezoelectric Actuator |
50/1 |
15, 30, 45 |
no |
Very small, ferromagnetic end pieces
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P-249
Piezoelectric Actuator |
150/3 |
5, 10 |
no |
Very small, w/o case |
P-820
Piezoelectric Actuator
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50/10
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15, 30, 45
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no
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Smallest preloaded translator
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P-250
Piezoelectric Actuator
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100/5
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20
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no
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Mounts in micrometer tip
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PL033
PL055
Piezoelectric Actuator
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100/1; 1000/5
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2.3
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no
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Ultra-compact, no case
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P-830
Piezoelectric Actuator
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1000/5
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15, 30, 45, 60
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no
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Small, ferromagnetic end pieces
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P-305
Piezoelectric Actuator
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500/20
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5, 10, 20, 40
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Yes/strain gauge
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Clear aperture (tubular stack)
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P-306
Piezoelectric Actuator
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800/40
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5, 10, 20, 40
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Yes/strain gauge
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Clear aperture (tubular stack)
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P-840
P-841
Piezoelectric Actuator
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1000/50
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded
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P-842
P-843
Piezoelectric Actuator
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800/300
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded
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P-178
P-170
Piezoelectric Actuator
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2000/50
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5, 10, 20, 40, 80
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Yes/strain gauge
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Choice of top and bottom pieces
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P-244
P-245
Piezoelectric Actuator
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2000/300
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded
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P-844
P-845
Piezoelectric Actuator
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3000/700
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded, Water-resistant option
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P-239
Piezoelectric Actuator
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4500/500
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5, 10, 20, 40, 60, 100, 140, 180
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Yes/strain gauge (stack translator)
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Preloaded, largest travel range
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P-242
P-246
Piezoelectric Actuator
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12500/2000
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded, very stiff, water-resistant option
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P-243
P-247
Piezoelectric Actuator
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30000/3500
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded, very stiff, water-resistant option
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| Piezo and Precision Motion Product Announcements |
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