Nanometer Precision Motion

Piezo Stages, Nano-Positioners, Scanners

Piezo stages provide highly precise, fast-response motion for microscopy, semiconductor manufacturing, optics, photonics, metrology and other applications where nanometer-level positioning is required.

What is a Piezo Stage and What is it used for?

A piezo stage, short for piezoelectric stage, is a highly precise positioning mechanism that uses the piezoelectric effect for accurate movement with resolution down to the nanometer range and below. The piezoelectric effect involves the generation of electric charge in response to mechanical stress and, conversely, controlled motion when an electric field is applied. Different types of piezo stages are optimized for longer travel, higher precision, higher dynamics or greater force.

In a piezo stage, one or more piezoelectric elements are usually integrated into the mechanical structure of the stage. When voltage is applied to the piezoelectric elements, they undergo minute deformations or expansions. These controlled changes create continuous, extremely fine motion for ultra-high precision positioning.

Piezoelectrics can also be used for sensing and as transducers with nanometric motion operating in the ultrasonic or even MHz range.

Piezo stages are known for high resolution, rapid response and exceptional precision, making them suitable for microscopy, semiconductor manufacturing, optics and other areas where precisely controlled motion is crucial. Due to their nanometer-precise positioning capability, these stages are also sometimes called nanopositioners. Piezoelectric stages are sometimes used together with other motion control components, such as linear motors in hybrid systems, to combine long travel with very fine adjustment.

Performance Advantages of Piezo Stages

Piezo stages provide advantages when very smooth motion with nanometer and subnanometer resolution is required. Piezoelectric nanopositioning stages are also superior to many motor technologies in step-and-settle behavior and fast scanning. Millisecond and even microsecond response is feasible with a well-designed piezo flexure stage.

Piezo motion stages work well in vacuum and can be manufactured with non-magnetic materials because the ceramic drive material itself is non-magnetic. PI is a world leader in piezo stage design with five decades of experience. PI's piezoelectric transducers have been life-tested for 100 billion cycles by JPL/NASA for the Mars Mission.

Nanometer and subnanometer resolution

Fast step-and-settle performance

Vacuum and non-magnetic options

High scanning dynamics

Flexure-guided precision motion

Hybrid long-travel configurations

Applications of Piezo Stages

Piezo stages are used in microscopy, semiconductor inspection, photonics alignment, optical testing, nanometrology, and precision manufacturing. Their nanometer-level motion, fast response, and smooth scanning capability make them ideal for positioning lenses, samples, fibers, probes, mirrors, and sensors where conventional motorized stages cannot provide sufficient resolution or stability. For high-load and long-travel 6-axis applications, hexapod robots are recommended.

Piezo Flexure Stages, Piezo Motors and Long-Travel Positioners

In addition to classical piezo flexure stages, PI also offers several types of piezo motors and piezo motor positioners with long travel ranges to 100 mm and more. Read this article on different piezo motor principles to learn how to select the right piezo motor or stage depending on the main priority, such as speed, force, resolution or cost.

See examples below, and click on the image for further details. PI's piezoceramic design and manufacturing division, PI Ceramic, specializes in piezoelectric transducers and ultrasound transducers.