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Piezo Stage Nanopositioners, Piezo Positioning Stages,
Flexure Stages & Scanning Stages
Introduction to Ultra-Precision Motion Control Systems
>> Piezo Stage PDF Catalog (3 MB) >> Flexure NanoPositioners
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PI designs and manufactures the fastest and highest precision piezo stages in the world. PI Piezo Flexure NanoPositioners are superior
to traditional positioners (with crossed roller bearings, etc.) in terms of response, speed, resolution, accuracy, straightness and flatness. Due to the inherent friction, traditional positioners are limited to applications requiring repeatability on the order of 0.5 to 0.1 µm, while PI PiezoFlexure NanoPositioners can easily achieve resolution and repeatability and flatness in the nanometer realm and below.
See Technologies that set PI apart for further information.
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| Ultra-Low-Inertia
NanoPositioning
PI offers the largest variety of custom and standard ultra-low inertia NanoPositioning Solutions.
Examples of Parallel-Kinematics / Metrology NanoPositioning
Systems
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Ultra-Low-Inertia
NanoPositioning Systems, Ultra-High Precision Position Sensors
Ultra-low-inertia solid-state
PZT nanopositioning stages can repeatedly move bidirectional nanometer
level steps, at up to hundreds of Hz if required.
Two plate capacitive
position sensors ensure highest linearity and longterm stability.
These absolute-measuring,
non-contact sensors detect motion at sub-nanometer levels directly
(direct output metrology) and provide accuracy, linearity, resolution,
stability and bandwidth superior to strain gauge type sensors (piezo resistive
sensors), LVDT sensors and incremental encoders (glass scale type encoders).
If used in parallel-kinematics multi-axis systems, they can also provide
the information for automatic runout-compensation.
Minimized recoil forces are
a by-product of the ultra-low-inertia approach.
Classical Micropositioning stages, even when equipped with high-resolution
encoders cannot achieve this precision. Their high inertia, friction,
and servo dither prevent fast motion at the nanometer level.
Click here for more information
on PI
Capacitive Position Sensors |
| Vibration
Elimination
The example above shows ringing
of a poorly damped component on a high-speed NanoPositioning stage.
While the closed-loop NanoPositioning stage settles perfectly, the component
cannot keep up. Conventional solutions to this problem would involve slowing
down the NanoPositioning stage. Mach™ eliminates
ringing without sacrificing speed.
It does not even require
retuning of the servo system. |
Mach™
Throughput Processor Eliminates Self-Generated Vibration, Increases Troughput,
Scanning Speed, Accuracy.
The exclusive Mach™
Throughput Processor™
eliminates resonant ringing, allowing rapid motion without a settling phase.
This technique also eliminates resonances excited in neighboring components,
outside the nanopositioning system's servo loop. The result is significantly
increased throughput.
Self-generated vibration
affects:
- The load and fixturing that
the nanopositioner actuates,
- The supporting structure on
which the nanopositioner is mounted, and
- All other components attached
to the supporting structure.
 
The example above shows
vibrations induced at the beginning of a saw-tooth scan, typical in image
acquisition applications. The vibration results in lower image quality.
Mach™ improves the image quailtiy; there is no need to reduce the scanning
frequency or chang the mechanical components in the system.
Mach™ is available as a firmware
option for several PI Digital Piezo Controllers and also as an upgrade
option for analog controllers.
Request our Technote on
Mach™
or talk to a PI Application Engineer:
This technology is protected
by one or more of the following US and foreign Patents licensed from Convolve,
Inc.: US 4,916,635; US 5,638,267; 0433375 Europe; 067152 Korea, and other
Patents pending. Mach™, Throughput Coprocessor™ and NanoAutomation®
are trademarks of Polytec PI, Inc. Input Shaping™ is a trademark
of Convolve, Inc. |
| Trajectory
Control |
Active Trajectory
Control.
Active Trajectory Control is
available on single-module parallel-metrology nanopositioning systems.
It can improve straightness and flatness to sub-nanometer precision. Digital
controllers with advanced coordinate transformation algorithms allow active
trajectory control for up to 6 DoF.
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DDL |
Dynamic Digital Linearization
Preshaping™
algorithms and dynamic digital linearization can increase
the dynamic linearity and effective bandwidth of high-speed nanopositioning systems by up to 3 orders of magnitude. This translates into higher dynamic accuracy, and increased throughput.
Applications range from
out-of-round machining (pistons, contact lenses, optics) to scanning microscopy.
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Flexure Technology |
Flexures, if designed properly,
are very stiff & robust, light weight, maintenance free, and provide
nanometer to sub-nanometer-level guiding precision (simple designs induce
cosine runout errors). They are frictionless and do neither require lubricants
nor air films.
Not
all flexures are created equal!
PI multi-axis NanoPositioning
systems are based on FEA calculated wire-EDM-cut parallel-kinematics flexure designs
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| Comparision of Serial and Parallel Kinematics / Metrology Designs |
A)
Stacking two single-axis stages (serial kinematics) |
Simple design but:
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Slower response (lower stage
carries inertial mass of upper stage);
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Non-symmetric dynamic behavior
(lower stage is slower than upper stage, requires different servo settings).
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Orthogonality error is mounting-angle
dependant.
Active Trajectory control not possible
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B)
Single-module (monolithic) but nested (serial) X and Y.
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Thinner and better response than A) but no other advantages |
C)
Single-module parallel-kinematics X and Y (with crosstalk compensation).
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Best solution.
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Same ultra-low
inertia for X and Y motion, providing higher responsiveness and axis-independent
performance.
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Excellent, mounting independent
orthogonality.
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Parallel-Metrology "sees" controlled degrees of freedom. Active Trajectory Control automatically compensates for runout.
Additional rotation axis
(Theta z ) feasible with 3 actuators / sensors and digital controller.
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Piezo NanoPositioning and Scanning Stages Selection Guide
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| *Models |
Axes |
*Travel [µm] |
*Feedback |
Notes |
PDF File |
Objective Nano-Focus Devices |
| P-725 Long Range Piezo Microscope Objective Positioner |
Z |
100, 250, 400 |
capacitive |
NEW: Extra long range, very compact & light weight |
Download PDF |
| P-721.CDQ Piezo Microscope Objective Positioner |
Z |
100 |
capacitive |
NEW: Microscope objective positioner.
Now with QuickLock |
Download PDF |
P-720, P-721
Piezo Microscope Objective Z-Stepper |
Z |
100 |
capacitive, LVDT |
Microscope objective positioner |
Download PDF |
P-722, P-723
Piezo Microscope Objective Z-Stepper |
Z |
200, 350 |
LVDT |
Microscope objective positioner |
Download PDF |
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Open Loop Single Axis Stages |
| P-280 Piezo NanoPositioning Piezo Stage |
X |
30, 50, 100 |
no |
Low cost, XY and XYZ combinations |
Download PDF |
| P-290 Piezo Vertical Positioner |
Z |
1000 |
no |
Large travel range |
Download PDF |
| P-287 Vertical /Tilt Piezo Positioner |
Z, θx |
700, 12 mrad |
no |
Large travel range |
Download PDF |
Closed Loop, Single Axis Stages with Direct Metrology Feedback
Direct metrology measures the
position of the moving platform rather than strain in the actuator (as is common with
lower-precision piezo resistive strain gauge sensors).
This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nano-meter level.
Download paper on state-of-the-art nanopositioning stages
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| P-783 Piezo Vertical Positioner |
Z |
300 |
LVDT |
Large travel range, closed-loop, compact |
Download PDF |
| P-772 Piezo NanoPositioner Stage |
X |
10 |
capacitive |
Ultra-compact, fast and accurate, smallest closed-loop stage with capacitive position feedback |
Download PDF |
| P-780 Piezo NanoPositioning Stage |
X |
80 |
LVDT |
Compact, fast, for small loads |
Download PDF |
| P-750 Piezo Stage |
X |
75 |
capacitive, LVDT |
Extremely straight motion, very stiff |
Download PDF |
| P-752 Piezo Stage |
X |
15, 30 |
capacitive |
Extremely fast and accurate, for FBG writing and disk drive
test set ups |
Download PDF |
| P-753 Piezo Actuator/Stage |
Z & X |
12, 25, 38 |
capacitive |
Very small and accurate, works as both stage and linear actuator |
Download PDF |
| NEW PIHera P-620 Piezo /Scanning Stage |
X (XY, Z) |
100, 250, 500 |
capacitive |
NEW! Low Cost, Compact, Extremely Long Travel.
Now also in XY, Z and XYZ |
Download PDF |
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Multi Axis, Serial Kinematics Stages |
| *Models |
Axes |
*Travel [µm] |
*Feedback |
Notes |
PDF File |
P-281
P-282 Piezo Stages |
XY, XYZ |
30, 50, 100 |
no |
Low cost, compact |
Download PDF |
| P-611 NanoCube XYZ Piezo Stage |
XYZ |
100 |
SGS |
Smallest XYZ closed-loop stage |
Download PDF |
| P-762 Series Piezo Nano-Scanning Stage |
X, XY, XYZ, Z,
Zθxθy, XYZθxθy |
100, ±2.6 mrad |
LVDT |
Compact, 20 X 20 mm clear aperture |
Download PDF |
| P-620 - P-625 X, XY, Z, XYZ PIHera Multi-Axis Piezo Stage |
X, XY, Z, XYZ |
50,100,250, 500 |
capacitive |
NEW: Very Compact, Long Travel, Low Cost, Very Precise. Direct Metrology |
Download PDF |
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| P-615 NanoCube™ 350C XYZ Piezo NanoAligner |
XYZ |
to 350 |
capacitive |
NEW: Aperture. Ideal also for photonic alignment. |
Download PDF |
| P-363 PicoCube™ XYZ, XY Piezo Scanner for AFM, SPM |
XY, XYZ |
6 |
capacitive |
NEW: Extremely high resolution, compact, ideal for Nanotech and Biotech. |
Download PDF |
| P-733 XY Piezo Nano- Scanning Stage |
XY |
100x100 |
capacitive |
NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture |
Download PDF |
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| P-733.DD Direct Drive XY, XYZ Piezo Nano- Scanning Stage |
XY, XYZ |
30x30 (x10) |
capacitive |
NEW: 20 mm flat. Extremely fast, 2 kHz Fres, Direct Drive, UH-Vacuum available. |
Download PDF |
| P-734 XY Piezo Stage |
XY |
100 |
capacitive |
Fast and accurate XY positioner, clear aperture, extremely straight and flat motion |
Download PDF |
| P-770 XY Piezo Stage |
XY |
200 |
LVDT |
200 X 200 mm clear aperture |
Download PDF |
| P-517, P-527 Series XY, XYZ, XYθz Piezo Nano-Scanning Stages |
XY, XYZ, XYθz |
Up to 200 in XYZ, 2 mrad |
capacitive |
Clear aperture, active trajectory control, special version with 6 degrees of freedom |
Download PDF |
| P-561 Series XY, XYZ, High-Speed, Direct Drive Microscopy Piezo Stages |
XY, XYZ |
45 XY, 11 Z |
capacitive |
NEW: Direct Drive, Ultra-Fast, Clear aperture, active trajectory control |
Download PDF |
| P-562 MARS Series XY, XYZ, Microscopy Piezo Nano-Scanning Stages |
XY, XYZ |
200x200x200 |
capacitive |
NEW: Long Range, High Speed, Clear aperture, active trajectory control |
Download PDF |
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| P-518, P-528 Series Z, Zθxθy |
Z, Zθxθy |
Up to 200 in Z, 2 mrad tip/tilt |
capacitive |
Clear aperture, active trajectory control, special version with 6 degrees of freedom |
Download PDF |
"Piezo Hexapod" 6DOF Parallel-Kinematic Stages |
| P-587 6D-Piezo Stage |
XYZ, θxθyθz |
800 / 10 mrad |
capacitive |
Sophisticated 6-axis closed-loop stage |
Download PDF |
Ultrasonic Piezo Linear Motor Driven Stages click here |
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*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision. For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section.
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Introduction to Piezo Actuators (Nano-Transducers)
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Piezo Actuators (PZT) are ultra-high-resolution Nano-Transducers for a variety of applications from Nanotechnology to Aerospace and Biotech. PI offers the largest selection of research and industrial-reliability Piezo Actuators and Translators (linear actuators) worldwide. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to customers’ requirements. PI is highly vertically integrated, controlling each manufacturing step from piezo raw materials to finished systems.
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Piezo Actuators, Piezo Ceramics Selection Guide
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| *Models |
Push/Pull
Force Capacity [N] |
Standard Travel Ranges [µm] |
*Closed-Loop Versions/Sensor |
Notes |
PICMA
P-885
Piezo Actuators |
1000/5 |
9, 15 |
no |
NEW: Ceramic insulated stacks worldwide first |
PT120
PT130
Piezo Actuators |
0.1/0.1 |
4, 6, 8 |
no |
Tube actuator |
PL122
PL140
Piezo Actuators |
1/1 |
+-250, 450, 1000 |
no |
Bender actuator, small dimensions |
P-288
Piezo Actuators |
10/5 |
50 |
no |
Disk translator (flat, large travel range) |
P-286
P-289
Piezo Actuators |
20/10 |
100, 200 |
no |
Disk translator (flat, large travel range) |
P-810
Piezo Actuators |
50/1 |
15, 30, 45 |
no |
Very small, ferromagnetic end pieces
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P-249
Piezo Actuators |
150/3 |
5, 10 |
no |
Very small, w/o case |
P-820
Piezo Actuators
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50/10
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15, 30, 45
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no
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Smallest preloaded translator
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P-250
Piezo Actuators
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100/5
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20
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no
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Mounts in micrometer tip
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P-802
Piezo Actuators
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1000/5
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6, 15
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no
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Compact, w/o case
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PL033
PL055
Piezo Actuators
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100/1; 1000/5
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2.3
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no
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Ultra-compact, no case
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P-830
Piezo Actuators
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1000/5
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15, 30, 45, 60
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no
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Small, ferromagnetic end pieces
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P-305
Piezo Actuators
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500/20
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5, 10, 20, 40
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Yes/strain gauge
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Clear aperture (tubular stack)
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P-306
Piezo Actuators
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800/40
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5, 10, 20, 40
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Yes/strain gauge
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Clear aperture (tubular stack)
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P-840
P-841
Piezo Actuators
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1000/50
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded
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P-842
P-843
Piezo Actuators
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800/300
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded
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P-178
P-170
Piezo Actuators
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2000/50
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5, 10, 20, 40, 80
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Yes/strain gauge
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Choice of top and bottom pieces
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P-244
P-245
Piezo Actuators
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2000/300
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded
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P-804
Piezo Actuators
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3000/20
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15
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no
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Compact, w/o case
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P-844
P-845
Piezo Actuators
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3000/700
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15, 30, 45, 60, 90
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Yes/strain gauge
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Preloaded, Water-resistant option
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P-239
Piezo Actuators
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4500/500
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5, 10, 20, 40, 60, 100, 140, 180
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Yes/strain gauge (stack translator)
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Preloaded, largest travel range
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P-242
P-246
Piezo Actuators
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12500/2000
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded, very stiff, water-resistant option
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P-243
P-247
Piezo Actuators
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30000/3500
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10, 20, 40, 60, 80, 120
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Yes/strain gauge
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Preloaded, very stiff, water-resistant option
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| *Custom dimensions, sensors, designs for volume buyers |
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