Piezo Stage Nanopositioners, Piezo Positioning Stages,
Flexure Stages & Scanning Stages


Microscopy Stages / Z-Motors
Multiaxis Piezo Stages (Parallel-Metrology)
Z-Piezo Stages / Actuators

Compact X / XY / XYZ Systems
Single Axis Piezo Stages
Piezo Stages with Aperture

6-Axis Piezo Stages
Piezo Motor Micro Stages
Piezo Motor Linear Piezo Stages

Scanning Stages w/ Voice Coil Drive
NEXLINE® / NEXACT® Piezo Motor Linear Actuators
Hybrid Piezo Stages: Piezo+DC Servo

Open-Frame XY Piezo-Motor Stage
Piezo Tip/Tilt Mirrors
Piezo Stack Actuators

PCI-Board Piezo Controllers
1-Channel Piezo Controllers
Digital Piezo Controllers

Introduction to Ultra-Precision Motion Control Systems

>> Piezo Stage PDF Catalog (3 MB)    >> Flexure NanoPositioners
PI designs and manufactures the fastest and highest precision piezo stages in the world. PI Piezo Flexure NanoPositioners are superior to traditional positioners (with crossed roller bearings, etc.) in terms of response, speed, resolution, accuracy, straightness and flatness. Due to the inherent friction, traditional positioners are limited to applications requiring repeatability on the order of 0.5 to 0.1 µm, while PI PiezoFlexure NanoPositioners can easily achieve resolution and repeatability and flatness in the nanometer realm and below.
See Technologies that set PI apart for further information.

Ultra-Low-Inertia NanoPositioning

Click here for NanoPositioner Selection Guide

PI offers the largest variety of custom and standard ultra-low inertia NanoPositioning Solutions. 
 

Examples of Parallel-Kinematics / Metrology NanoPositioning Systems 

Ultra-Low-Inertia NanoPositioning Systems, Ultra-High Precision Position Sensors


Ultra-low-inertia solid-state PZT nanopositioning stages can repeatedly move bidirectional nanometer level steps, at up to hundreds of Hz if required. 

Two plate capacitive position sensors ensure highest linearity and longterm stability. 
These absolute-measuring, non-contact  sensors detect motion at sub-nanometer levels directly (direct output metrology) and provide accuracy, linearity, resolution, stability and bandwidth superior to strain gauge type sensors (piezo resistive sensors), LVDT sensors and incremental encoders (glass scale type encoders).  If used in parallel-kinematics multi-axis systems, they can also provide the information for automatic runout-compensation.

Minimized recoil forces are a by-product of the ultra-low-inertia approach.  Classical Micropositioning stages, even when equipped with high-resolution encoders cannot achieve this precision.  Their high inertia, friction, and servo dither prevent fast motion at the nanometer level.

Click here for more information on PI Capacitive Position Sensors 
Vibration Elimination

The example above shows ringing of a poorly damped component on a high-speed NanoPositioning stage.  While the closed-loop NanoPositioning stage settles perfectly, the component cannot keep up. Conventional solutions to this problem would involve slowing down the NanoPositioning stage.  Mach™ eliminates ringing without sacrificing speed. 
It does not even require retuning of the servo system.

Mach™ Throughput Processor Eliminates Self-Generated Vibration, Increases Troughput, Scanning Speed, Accuracy. 

The exclusive Mach™ Throughput Processor™ eliminates resonant ringing, allowing rapid motion without a settling phase. This technique also eliminates resonances excited in neighboring components, outside the nanopositioning system's servo loop.  The result is significantly increased throughput. 

Self-generated vibration affects:

  • The load and fixturing that the nanopositioner actuates, 
  • The supporting structure on which the nanopositioner is mounted, and
  • All other components attached to the supporting structure.


The example above shows vibrations induced at the beginning of a saw-tooth scan, typical in image acquisition applications. The vibration results in lower image quality.  Mach™ improves the image quailtiy; there is no need to reduce the scanning frequency or chang the mechanical components in the system.
Mach™ is available as a firmware option for several PI Digital Piezo Controllers and also as an upgrade option for analog controllers.

Request our Technote on
Mach™ or talk to a PI Application Engineer:
 


This technology is protected by one or more of the following US and foreign Patents licensed from Convolve, Inc.: US 4,916,635; US 5,638,267; 0433375 Europe; 067152 Korea, and other Patents pending.  Mach™, Throughput Coprocessor™ and NanoAutomation® are trademarks of Polytec PI, Inc.  Input Shaping™ is a trademark of Convolve, Inc.
Trajectory Control

Active Trajectory Control.

Active Trajectory Control is available on single-module parallel-metrology nanopositioning systems. It can improve straightness and flatness to sub-nanometer precision. Digital controllers with advanced coordinate transformation algorithms allow active trajectory control for up to 6 DoF. 

 

DDL

Dynamic Digital Linearization


Preshaping™ algorithms and dynamic digital linearization can increase the dynamic linearity and effective bandwidth of high-speed nanopositioning systems by up to 3 orders of magnitude. This translates into higher dynamic accuracy, and increased throughput. 

Applications range from out-of-round machining (pistons, contact lenses, optics) to scanning microscopy.

Flexure Technology

 Flexures, if designed properly, are very stiff & robust, light weight, maintenance free, and provide nanometer to sub-nanometer-level guiding precision (simple designs induce cosine runout errors). They are frictionless and do neither require lubricants nor air films. 

Not all flexures are created equal!
PI multi-axis NanoPositioning systems are based on FEA calculated wire-EDM-cut parallel-kinematics flexure designs

Comparision of Serial and Parallel Kinematics / Metrology Designs
A) Stacking two single-axis stages (serial kinematics) Simple design but:
  • Slower response (lower stage carries inertial mass of upper stage);
  • Non-symmetric dynamic behavior (lower stage is slower than upper stage, requires different servo settings).
  • Orthogonality error is mounting-angle dependant.

    • Active Trajectory control not possible
B) Single-module (monolithic) but nested (serial) X and Y.
Thinner and better response than A) but no other advantages
C) Single-module parallel-kinematics X and Y (with crosstalk compensation).
Best solution. 
  • Same ultra-low inertia for X and Y motion, providing higher responsiveness and axis-independent performance. 
  • Excellent, mounting independent orthogonality. 
  • Parallel-Metrology "sees" controlled degrees of freedom. Active Trajectory Control automatically compensates for runout.  

    • Additional rotation axis (Theta z ) feasible with 3 actuators / sensors and digital controller.

Piezo NanoPositioning and Scanning Stages Selection Guide

*Models Axes *Travel [µm] *Feedback Notes PDF File
Objective Nano-Focus Devices
P-725 Long Range Piezo Microscope Objective Positioner Z 100, 250, 400 capacitive NEW: Extra long range, very compact & light weight Download PDF
P-721.CDQ Piezo Microscope Objective Positioner Z 100 capacitive NEW: Microscope objective positioner.
Now with QuickLock 		Download PDF
P-720, P-721
Piezo Microscope Objective Z-Stepper		 Z 100 capacitive, LVDT Microscope objective positioner Download PDF
P-722, P-723
Piezo Microscope Objective Z-Stepper		 Z 200, 350 LVDT Microscope objective positioner Download PDF
 
Open Loop Single Axis Stages
P-280 Piezo NanoPositioning Piezo Stage X 30, 50, 100 no Low cost, XY and XYZ combinations Download PDF
P-290 Piezo Vertical Positioner Z 1000 no Large travel range Download PDF
P-287 Vertical /Tilt Piezo Positioner Z, θx 700, 12 mrad no Large travel range Download PDF
Closed Loop, Single Axis Stages with Direct Metrology Feedback
Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors).
This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nano-meter level.
Download paper on state-of-the-art nanopositioning stages
P-783 Piezo Vertical Positioner Z 300 LVDT Large travel range, closed-loop, compact Download PDF
P-772 Piezo NanoPositioner Stage X 10 capacitive Ultra-compact, fast and accurate, smallest closed-loop stage with capacitive position feedback Download PDF
P-780 Piezo NanoPositioning Stage X 80 LVDT Compact, fast, for small loads Download PDF
P-750 Piezo Stage X 75 capacitive, LVDT Extremely straight motion, very stiff Download PDF
P-752 Piezo Stage X 15, 30 capacitive Extremely fast and accurate, for FBG writing and disk drive test set ups Download PDF
P-753 Piezo Actuator/Stage Z & X 12, 25, 38 capacitive Very small and accurate, works as both stage and linear actuator Download PDF
NEW PIHera P-620 Piezo /Scanning Stage X (XY, Z) 100, 250, 500 capacitive NEW! Low Cost, Compact, Extremely Long Travel.
Now also in XY, Z and XYZ		 Download PDF
 
Multi Axis, Serial Kinematics Stages
*Models Axes *Travel [µm] *Feedback Notes PDF File
P-281
P-282 Piezo Stages		 XY, XYZ 30, 50, 100 no Low cost, compact Download PDF
P-611 NanoCube XYZ Piezo Stage XYZ 100 SGS Smallest XYZ closed-loop stage Download PDF
P-620 - P-625 X, XY, Z, XYZ PIHera Multi-Axis Piezo Stage X, XY, Z, XYZ 50,100,250, 500 capacitive NEW: Very Compact, Long Travel, Low Cost, Very Precise. Direct Metrology Download PDF
 
Multi-Axis, Parallel Metrology, Parallel Kinematics Stages
Parallel metrology can "see" all controlled degrees of freedom simultaneously.
These stages provide superior trajectory control to serial kinematics stages.
Download paper on state-of-the-art nanopositioning stages
P-615 NanoCube™ 350C XYZ Piezo NanoAligner XYZ to 350 capacitive NEW: Aperture. Ideal also for photonic alignment. Download PDF
P-363 PicoCube™ XYZ, XY Piezo Scanner for AFM, SPM XY, XYZ 6 capacitive NEW: Extremely high resolution, compact, ideal for Nanotech and Biotech. Download PDF
P-733 XY Piezo Nano- Scanning Stage XY 100x100 capacitive NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture Download PDF
 
P-733.DD Direct Drive XY, XYZ Piezo Nano- Scanning Stage XY, XYZ 30x30 (x10) capacitive NEW: 20 mm flat. Extremely fast, 2 kHz Fres, Direct Drive, UH-Vacuum available. Download PDF
P-734 XY Piezo Stage XY 100 capacitive Fast and accurate XY positioner, clear aperture, extremely straight and flat motion Download PDF
P-770 XY Piezo Stage XY 200 LVDT 200 X 200 mm clear aperture Download PDF
P-517, P-527 Series XY, XYZ, XYθz Piezo Nano-Scanning Stages XY, XYZ, XYθz Up to 200 in XYZ, 2 mrad capacitive Clear aperture, active trajectory control, special version with 6 degrees of freedom Download PDF
P-561 Series XY, XYZ, High-Speed, Direct Drive Microscopy Piezo Stages XY, XYZ 45 XY, 11 Z capacitive NEW: Direct Drive, Ultra-Fast, Clear aperture, active trajectory control Download PDF
P-562 MARS Series XY, XYZ, Microscopy Piezo Nano-Scanning Stages XY, XYZ 200x200x200 capacitive NEW: Long Range, High Speed, Clear aperture, active trajectory control Download PDF
         
P-518, P-528 Series Z, Zθxθy Z, Zθxθy Up to 200 in Z, 2 mrad tip/tilt capacitive Clear aperture, active trajectory control, special version with 6 degrees of freedom Download PDF
"Piezo Hexapod" 6DOF Parallel-Kinematic Stages
P-587 6D-Piezo Stage XYZ, θxθyθz 800 / 10 mrad capacitive Sophisticated 6-axis closed-loop stage Download PDF
Ultrasonic Piezo Linear Motor Driven Stages click here
 
*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision.

For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section.

Introduction to Piezo Actuators (Nano-Transducers)
Piezo Actuators (PZT) are ultra-high-resolution Nano-Transducers for a variety of applications from Nanotechnology to Aerospace and Biotech. PI offers the largest selection of research and industrial-reliability Piezo Actuators and Translators (linear actuators) worldwide. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to customers’ requirements. PI is highly vertically integrated, controlling each manufacturing step from piezo raw materials to finished systems.

Piezo Actuators, Piezo Ceramics Selection Guide

*Models Push/Pull
Force Capacity [N]		 Standard Travel Ranges [µm] *Closed-Loop Versions/Sensor Notes
PICMA
P-885
Piezo Actuators 		1000/5 9, 15 no NEW: Ceramic insulated stacks worldwide first
PT120
PT130
Piezo Actuators		 0.1/0.1 4, 6, 8 no Tube actuator
PL122
PL140
Piezo Actuators 		1/1 +-250, 450, 1000 no Bender actuator, small dimensions
P-288
Piezo Actuators 		10/5 50 no Disk translator (flat, large travel range)
P-286
P-289
Piezo Actuators		 20/10 100, 200 no Disk translator (flat, large travel range)
P-810
Piezo Actuators 		50/1 15, 30, 45 no Very small, ferromagnetic end pieces
P-249
Piezo Actuators 		150/3 5, 10 no Very small, w/o case
P-820
Piezo Actuators 		50/10 15, 30, 45 no Smallest preloaded translator
P-250
Piezo Actuators 		100/5 20 no Mounts in micrometer tip
PL033
PL055
Piezo Actuators 		100/1; 1000/5 2.3 no Ultra-compact, no case
P-830
Piezo Actuators 		1000/5 15, 30, 45, 60 no Small, ferromagnetic end pieces
P-305
Piezo Actuators 		500/20 5, 10, 20, 40 Yes/strain gauge Clear aperture (tubular stack)
P-306
Piezo Actuators 		800/40 5, 10, 20, 40 Yes/strain gauge Clear aperture (tubular stack)
P-840
P-841
Piezo Actuators 		1000/50 15, 30, 45, 60, 90 Yes/strain gauge Preloaded
P-842
P-843
Piezo Actuators 		800/300 15, 30, 45, 60, 90 Yes/strain gauge Preloaded
P-178
P-170
Piezo Actuators 		2000/50 5, 10, 20, 40, 80 Yes/strain gauge Choice of top and bottom pieces
P-244
P-245
Piezo Actuators 		2000/300 10, 20, 40, 60, 80, 120 Yes/strain gauge Preloaded
P-844
P-845
Piezo Actuators 		3000/700 15, 30, 45, 60, 90 Yes/strain gauge Preloaded, Water-resistant option
P-239
Piezo Actuators 		4500/500 5, 10, 20, 40, 60, 100, 140, 180 Yes/strain gauge (stack translator) Preloaded, largest travel range
P-242
P-246
Piezo Actuators 		12500/2000 10, 20, 40, 60, 80, 120 Yes/strain gauge Preloaded, very stiff, water-resistant option
P-243
P-247
Piezo Actuators 		30000/3500 10, 20, 40, 60, 80, 120 Yes/strain gauge Preloaded, very stiff, water-resistant option
*Custom dimensions, sensors, designs for volume buyers